The 7th annual Lurie Nanofabrication Facility User’s Symposium was held on Thursday, December 12th, in the Gerald R. Ford Library. The Symposium brings the entire LNF community together to share their accomplishments and celebrate the wide variety of research being done at the LNF.
This year’s keynote speaker was Dr. Janay Camp, the Technical Communications Manager at KLA. KLA is a global capital equipment company that inhabits the nexus of electron and photon optics, sensor technology, and artificial intelligence. KLA’s main headquarters is in Silicon Valley, but they are currently building a second headquarters in Ann Arbor that will open in 2021.
Dr. Camp’s keynote lecture was titled, “The Nanoscale in Manufacturing: Solving Big Problems for Really Small Stuff.”
The event began with a welcome from LNF Director Jamie Phillips and included an exhibitor show that featured the symposium sponsors: Hawk Semiconductor, Angstrom Engineering, EV Group, Kurt J. Lesker, Ebara Technologies, Applied Energy Systems, OEM Group, Intlvac, Stavac, and MKS Instruments.
There were also a variety of technical talks and a poster session, sponsored by Neuronexus, Translume, and Quantum Opus. The top three posters took home cash prizes. ECE PhD student Dejiu Fan won 1st place and BME student Paras Patel won 2nd place. 3rd place was awarded to ECE PhD student Chris Allemang and Chemical Engineering student Tobias Burger. Fan is advised by Stephen Forrest, the Peter A. Franken Distinguished University Professor and Paul G. Goebel Professor of Engineering. Allemang is advised by Prof. Becky Peterson.
At the end of the day, Dr. Sandrine Martin, the LNF Managing Director, provided tours of the state-of- the-art shared facility. The LNF features 13,500 sq. ft of cleanroom space and provides advanced micro- and nano-fabrication equipment and expertise to internal and external researchers. LNF supports and enables cutting edge research from semiconductor materials and devices, electronic circuits, solid-state lighting, energy, biotechnology, medical devices and unconventional materials and processing technologies. It is available for use by research groups from universities, government, and industry, and provides expertise to assist researchers with their projects.